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6.152J / 3.155J Micro/Nano Processing Technology, Fall 2005

A device pad structure, shown with a penny for scale.
A device pad structure, shown with a penny for scale. (Image courtesy of Georgia Tech Center for Low Cost Electronics Packaging Research; photo by Stanley F. Leary. Image provided by the National Science Foundation Image Library.)

Highlights of this Course

This course features detailed lecture slides in the lecture notes section, along with other lab materials used by students in the course in the labs section. In addition, problem sets with solutions are also provided in the assignments section.

Course Description

This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.


Prof. Martin Schmidt
Dr. Robert O'Handley
Susan Ruff

Course Meeting Times

Two sessions / week
1.5 hours / session

One session / week (9 weeks)
4 hours / session




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